On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide
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Carbon Nanotubes Synthesis by Chemical Vapor Deposition of Methane over Zn – Fe Mixed Catalysts Supported on Alumina
Carbon nanotubes were synthesized over a series of Zn-containing Fe/alumina catalysts by chemical vapor deposition method at two reaction temperatures of 850 and 950 °C using methane as a carbon source. Catalysts were synthesized by keeping Fe concentration constant and varying Zn concentration to study the effects of Zn. The catalysts were characterized using X – ray powder diffraction and N2 ...
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We evaluated the effect of Fe/Alumina Catalyst contained different Cadmium contents and two synthesis temperatures on producing carbon nanotubes by chemical vapor deposition of methane as a feedstock. X-ray powder diffraction (XRD), N2 adsorption-desorption, scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman spectroscopy and Thermogravimetry analysis (TGA) were u...
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The goals of this work were to synthesize stoichiometric silicon carbon nitride (Si1.5C1.5N4) films using the RF-PECVD method and to characterize the deposited material. Gas mixtures, as opposed to an organic monomer, were chosen for reactants. Gas mixtures allow for varying the concentration of the elements needed for silicon carbon nitride synthesis and thereby optimizing the composition of t...
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1,3-Disilabutane is used as a single-source precursor to deposit conformal silicon-carbide films on silicon atomic-force-microscopy cantilevers. By measuring the resonance frequency of the cantilever as a function of silicon-carbide film thickness and developing an appropriate model, the value of the film’s elastic modulus is determined. This value is in good agreement with those reported for s...
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تاریخ انتشار 2014